RT Journal Article T1 Femtosecond pulsed laser deposition of nanostructured TiO2 films A1 Sanz, Mikel A1 Walczak, Malgorzata A1 Nalda, Rebeca de A1 Oujja, Mohamed A1 Marco, José A1 Rodriguez, Javier A1 Izquierdo, Jesús A1 Bañares Morcillo, Luis A1 Castillejo, Marta AB Nanostructured deposits of TiO2 were grown on Si (1 0 0) substrates by laser ablating a TiO2 sintered target in vacuum or in oxygen using a Ti:sapphire laser delivering 80 fs pulses. The effect of the laser irradiation wavelength on the obtained nanostructures, was investigated using 800, 400 and 266 nm at different substrate temperatures and pressures of oxygen. The composition of the deposits was characterized using X-ray photoelectron spectroscopy (XPS) and the surface morphology was studied by environmental scanning electron microscopy (ESEM) and atomic force microscopy (AFM). Deposits are absent of microscopic droplets in all conditions explored. The best deposits, constituted by nanoparticles of an average diameter of 30 nm with a narrow size distribution, were obtained at the shorter laser wavelength of 266 nm under vacuum at substrate room temperature PB Elsevier SN 0169-4332 YR 2009 FD 2009 LK https://hdl.handle.net/20.500.14352/93081 UL https://hdl.handle.net/20.500.14352/93081 LA eng NO Sanz, Mikel, et al. «Femtosecond Pulsed Laser Deposition of Nanostructured TiO2 Films». Applied Surface Science, vol. 255, n.o 10, marzo de 2009, pp. 5206-10. https://doi.org/10.1016/j.apsusc.2008.07.148. NO Ministerio de Economia y ́Competitividad (España) DS Docta Complutense RD 10 abr 2025