TY  - JOUR
AU  - Martil De La Plaza, Ignacio
AU  - González Díaz, Germán
AU  - Hernández Rojas, J. L.
AU  - Lucía Mulas, María Luisa
AU  - Sánchez Quesada, Francisco
AU  - Santamaría Sánchez-Barriga, Jacobo
PY  - 1992
DO  - 10.1063/1.108193
SN  - 0003-6951
UR  - https://hdl.handle.net/20.500.14352/59310
T2  - Applied physics Letters
AB  - An optical spectroscopic study of the plasma produced during rf sputtering of an YBa2Cu3O7-x target was performed to analyze two basic properties of the deposition process: resputtering effects and oxidation mechanisms. Strong emissions of all the...
LA  - eng
M2  - 231
PB  - Amer Inst Physics
KW  - Physics
KW  - Applied.
TI  - Optical spectroscopic study of the growth dynamicsof radio-frequency-sputtered YBa2Cu3O(7-x) thin films
TY  - journal article
VL  - 61
ER  -