RT Journal Article
T1 Cathodoluminescence study of ArF excimer laser-induced planarization of large grain diamond films
A1 Cremades Rodríguez, Ana Isabel
A1 Piqueras De Noriega, Francisco Javier
A1 Solís, J.
AB Planarization of large grain diamond films has been induced by 193 nm excimer laser irradiation. Secondary emission images and cathodoluminescence (CL) in the scanning electron microscope have been used to characterize-the irradiated area. Irradiation causes changes in the structure of defects involving nitrogen and vacancies. Evolution of the CL signal with the number of pulses indicates that the luminescence intensity tends to stabilize when a smooth film surface is obtained.
PB American Institute of Physics
SN 0021-8979
YR 1996
FD 1996-05-15
LK https://hdl.handle.net/20.500.14352/58861
UL https://hdl.handle.net/20.500.14352/58861
LA eng
NO © 1996 American Institute of Physics.This work has been supported by DGICYT (Projects Nos. PB-93-1256 and HP94-098).
NO DGICYT (Spain)
DS Docta Complutense
RD 10 abr 2025