TY  - JOUR
AU  - Cremades Rodríguez, Ana Isabel
AU  - Piqueras De Noriega, Francisco Javier
AU  - Solís, J.
PY  - 1996
DO  - 10.1063/1.362371
SN  - 0021-8979
UR  - https://hdl.handle.net/20.500.14352/58861
T2  - Journal of Applied Physics
AB  - Planarization of large grain diamond films has been induced by 193 nm excimer laser irradiation. Secondary emission images and cathodoluminescence (CL) in the scanning electron microscope have been used to characterize-the irradiated area. Irradiation...
LA  - eng
M2  - 8118
PB  - American Institute of Physics
KW  - Chemical-Vapor-Deposition
KW  - Defects
KW  - Impurities
TI  - Cathodoluminescence study of ArF excimer laser-induced planarization of large grain diamond films
TY  - journal article
VL  - 79
ER  -