TY  - JOUR
AU  - Martil De La Plaza, Ignacio
AU  - González Díaz, Germán
AU  - Prado Millán, Álvaro Del
AU  - San Andrés Serrano, Enrique
PY  - 2003
DO  - 10.1063/1.1626798
SN  - 0021-8979
UR  - https://hdl.handle.net/20.500.14352/51127
T2  - Journal of Applied Physics
AB  - The composition, bonding configuration, hydrogen content, and paramagnetic defects of SiOxHy thin films were studied. Films were deposited by the electron cyclotron resonance plasma method at room temperature using SiH4 and O-2 as precursor gases. The...
LA  - eng
M2  - 7462
PB  - American Institute of Physics
KW  - Chemical-Vapor-Deposition
KW  - Silicon-Rich Oxide
KW  - H FIlms
KW  - Optical-Properties
KW  - Si/SiO2 Interface
KW  - Spin-Resonance
KW  - Oxygen
KW  - SiO2
KW  - Nanocrystals
KW  - System.
TI  - Bonding configuration and density of defects of SiOxHy thin films deposited by the electron cyclotron resonance plasma method
TY  - journal article
VL  - 94
ER  -