TY  - CHAP
AU  - Méndez Martín, María Bianchi
AU  - Piqueras De Noriega, Francisco Javier
PY  - 1989
SN  - 0-85498-056-3
SN  - 0951-3248
UR  - https://hdl.handle.net/20.500.14352/60829
T2  - Institute of Physics Conference Series
AB  - The capabilities of SEAM in uniformity assessment of SI GaAs are investigated. Profiles of SEAM signals across the wafer and SEAM images of dislocation distribution are obtained. Part of the nonlinear signal shows a profile that is not related to...
M2  - 789
PB  - IOP Publishing LTD
KW  - Lec Gaas
KW  - Semiconductors
TI  - Uniformity characterization of SI-GaAs by cathodoluminescence and scanning electron acoustic microscopy
TY  - book part
ER  -