RT Journal Article T1 Phase-shifting interferometry based on induced vibrations A1 Quiroga Mellado, Juan Antonio A1 Vargas Balbuena, Javier A1 Álvarez Herrero, Alberto A1 Belenguer Dávila, Tomás AB The presence of uncontrolled mechanical vibrations is typically the main precision-limiting factor of a phase-shifting interferometer. We present a method that instead of trying to insolate vibrations; it takes advantage of their presence to produce the different phase-steps. The method is based on spatial and time domain processing techniques to compute first the different unknown phase-steps and then reconstruct the phase from these tilt-shifted interferograms. In order to compensate the camera movement, it is needed to perform an affine registration process between the different interferograms. Simulated and experimental results demonstrate the effectiveness of the proposed technique without the use of any phase-shifter device PB The Optical Society Of America SN 1094-4087 YR 2011 FD 2011-01-17 LK https://hdl.handle.net/20.500.14352/43932 UL https://hdl.handle.net/20.500.14352/43932 LA eng NO 1. K. Creath, ―Phase-shifting interferometry techniques,‖ Prog. Opt. 26, 350–393 (1988).2. D. Malacara, M. Servín, and Z. Malacara, Interferogram analysis for optical testing, (Marcel Dekker, Inc, 1998) 3. K. A. Goldberg, and J. Bokor, ―Fourier-transform method of phase-shift determination,‖ Appl. Opt. 40(17), 2886–2894 (2001).4. Z. Wang, and B. Han, ―Advanced iterative algorithm for phase extraction of randomly phase-shifted interferograms,‖ Opt. Lett. 29(14), 1671–1673 (2004).5. M. Chen, H. Guo, and C. Wei, ―Algorithm immune to tilt phase-shifting error for phase-shifting interferometers,‖ Appl. Opt. 39(22), 3894–3898 (2000).6. A. Dobroiu, D. Apostol, V. Nascov, and V. Damian, ―Tilt-compensating algorithm for phase-shift interferometry,‖ Appl. Opt. 41(13), 2435–2439 (2002).7. J. Xu, Q. Xu, and L. Chai, ―Tilt-shift determination and compensation in phase-shifting interferometry,‖ J. Opt. A, Pure Appl. Opt. 10(7), 075011 (2008).8. Z. Ge, and M. Takeda, ―Self-reference method for phase-shift interferometry,‖ Proc. SPIE 4416, 152–157 (2001).9. G. Rodríguez-Zurita, N. I. Toto-Arellano, C. Meneses-Fabian, and J. F. Vázquez-Castillo, ―One-shot phase-shifting interferometry: five, seven, and nine interferograms,‖ Opt. Lett. 33(23), 2788–2790 (2008).10. R. Hartley, and A. Zisserman, Multiple View Geometry in Computer Vision, (Cambridge University Press, 2004).11. C. Harris, and M. J. Stephens, ―A combined corner and edge detector,‖ in Alvey Vision Conference, pp. 147–152 (1988).12. J. C. Wyant, and K. Creath, ―Basic Wavefront Aberation Theory of Optical Metrology,‖ in Applied Optics and Optical Engineering, Vol. XI, Chapter 1, Academic Press (1992). NO ©2011 Optical Society of America DS Docta Complutense RD 26 ago 2024