TY  - THES
AU  - Feijoo Guerro, Pedro Carlos
A3  - San Andrés Serrano, Enrique
PY  - 2013
UR  - https://hdl.handle.net/20.500.14352/37491
AB  - This thesis studies two different approaches for further downscaling in the CMOS technology and the flash memory devices. In the first place, we study Gd2-xScxO3 deposited by high pressure sputtering as a candidate for the third generation of high k...
LA  - eng
PB  - Universidad Complutense de Madrid
KW  - Física
KW  - Circuitos integrados
TI  - High permittivity dielectrics for next generations of integrated circuits
M3  - doctoral thesis
ER  -