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oai:docta.ucm.es:20.500.14352/456472024-07-08T14:10:47Zcom_20.500.14352_14col_20.500.14352_21

Far field of binary phase gratings with errors in the height of the strips Rico García, José María Sánchez Brea, Luis Miguel Diffraction gratings are not always ideal but, due to the fabrication process, several errors can be produced. In this work we show that when the strips of a binary phase diffraction grating present certain randomness in their height, the intensity of the diffraction orders varies with respect to that obtained with a perfect grating. To show this, we perform an analysis of the mutual coherence function and then, the intensity distribution at the far field is obtained. In addition to the far field diffraction orders, a "halo" that surrounds the diffraction order is found, which is due to the randomness of the strips height. 2023-06-20T05:48:06Z 2023-06-20T05:48:06Z 2023-06-20T05:48:06Z 2009-06-17 book part https://hdl.handle.net/20.500.14352/45647 XXXX-XXXX 10.1117/12.827580 eng Proceedings of SPIE CCG08-UCM/DPI-3952 Rico García, J. M. y Sánchez Brea, L. M. «Far field of binary phase gratings with errors in the height of the strips». Modeling Aspects in Optical Metrology II, vol. 7390, SPIE, 2009, pp. 426-33. www.spiedigitallibrary.org, https://doi.org/10.1117/12.827580. open access SPIE