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Far field of binary phase gratings with errors in the height of the strips Rico García, José María Sánchez Brea, Luis Miguel Conference on Modeling Aspects in Optical Metrology II; Munich, GERMANY; JUN 15-16, 2009. Diffraction gratings are not always ideal but, due to the fabrication process, several errors can be produced. In this work we show that when the strips of a binary phase diffraction grating present certain randomness in their height, the intensity of the diffraction orders varies with respect to that obtained with a perfect grating. To show this, we perform an analysis of the mutual coherence function and then, the intensity distribution at the far field is obtained. In addition to the far field diffraction orders, a "halo" that surrounds the diffraction order is found, which is due to the randomness of the strips height. 2023-06-20T05:48:06Z 2023-06-20T05:48:06Z Copyright 2009. Society of Photo Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. 2009-06-17 book part Rico García, J. M. y Sánchez Brea, L. M. «Far field of binary phase gratings with errors in the height of the strips». Modeling Aspects in Optical Metrology II, vol. 7390, SPIE, 2009, pp. 426-33. www.spiedigitallibrary.org, https://doi.org/10.1117/12.827580. 9780819476739 10.1117/12.827580 https://hdl.handle.net/20.500.14352/45647 http://dx.doi.org/10.1117/12.827580 http://spie.org/Publications/Proceedings/Paper/10.1117/12.827580 http://cisne.sim.ucm.es/record=b3528557~S6*spi http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=784442 eng Proceedings of SPIE CCG08-UCM/DPI-3952 open access SPIE