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               <mods:identifier type="issn">2643-1300</mods:identifier>
               <mods:identifier type="doi">10.1109/CDE52135.2021.9455720</mods:identifier>
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               <mods:abstract>Germanium hyperdoped with deep level donors,
such as tellurium, would lead to dopant-mediated sub-band gap mid-infrared photoresponse at room temperature. We use a
combination of non-equilibrium techniques to supersaturate Ge with Te via ion implantation followed by pulsed laser melting (PLM). Typically, liquid N2 (77K) temperatures are used to avoid implantation-induced Ge surface porosity. In this work, alternatively, we report on the use of slightly higher implantation temperatures (143 K) together with an amorphous Si (a-Si) capping layer. We demonstrate that the solid solubility limit of Te in Ge is overcome upon recovering the crystallinity of the material after laser processing.</mods:abstract>
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