2026-06-08T03:46:06Zhttps://docta.ucm.es/rest/oai/request

oai:docta.ucm.es:20.500.14352/85072024-09-02T15:16:40Zcom_20.500.14352_14col_20.500.14352_15

Overcoming the solid solubility limit of Te in Ge by ion implantation and pulsed laser melting recrystallization Caudevilla Gutiérrez, Daniel Berencen, Y. Algaidy, Sari Zenteno Pérez, Francisco Olea Ariza, Javier San Andrés Serrano, Enrique García Hernansanz, Rodrigo Prado Millán, Álvaro Del Pastor Pastor, David García Hemme, Eric Germanium hyperdoped with deep level donors, such as tellurium, would lead to dopant-mediated sub-band gap mid-infrared photoresponse at room temperature. We use a combination of non-equilibrium techniques to supersaturate Ge with Te via ion implantation followed by pulsed laser melting (PLM). Typically, liquid N2 (77K) temperatures are used to avoid implantation-induced Ge surface porosity. In this work, alternatively, we report on the use of slightly higher implantation temperatures (143 K) together with an amorphous Si (a-Si) capping layer. We demonstrate that the solid solubility limit of Te in Ge is overcome upon recovering the crystallinity of the material after laser processing. 2023-06-17T09:16:09Z 2023-06-17T09:16:09Z 2023-06-17T09:16:09Z 2021 journal article https://hdl.handle.net/20.500.14352/8507 2643-1300 10.1109/CDE52135.2021.9455720 eng (TEC2017-84378-R; PRE2018-083798) MADRID-PV2 (P2018/EMT-4308) RYC- 2014-16936 https://creativecommons.org/licenses/by-nc-nd/3.0/es/ open access Atribución-NoComercial-SinDerivadas 3.0 España IEEE