Panin, G. N.Fernández Sánchez, PalomaPiqueras De Noriega, Francisco Javier2023-06-202023-06-201996-090268-124210.1088/0268-1242/11/9/018https://hdl.handle.net/20.500.14352/59208© 1996 IOP Publishing Ltd. This work has been supported by DGICYT (project PB93-1256). G Panin thanks the Ministerio de Educacion y Ciencia for a research grant. Japan Energy Corporation is acknowledged for providing some of the samples.The effect of ion milling on the defect structure of CdTe crystals has been investigated in the scanning electron microscope by cathodoluminescence. Enhancement in the luminescence intensity is observed after ion treatment. Luminescence spectra of treated and untreated zones of the samples indicate that ion milling causes generation of tellurium vacancies and filling of cadmium vacancies in a subsurface layer. In addition, enhancement of the concentration of cadmium vacancy related defects in the region extending up to 20 mu m from the layer is revealed. This effect is discussed in connection with models of p- to n-type conversion of CdTe during ion milling.engjournal articlehttp://dx.doi.org/10.1088/0268-1242/11/9/018http://iopscience.iop.orgrestricted access538.9Deep CentersCathodoluminescenceConversion Hg_(1-X)Cd_xTeFísica de materiales