Zaldivar, M.H.Fernández Sánchez, PalomaPiqueras De Noriega, Francisco Javier2023-06-202023-06-201998-080268-124210.1088/0268-1242/13/8/013https://hdl.handle.net/20.500.14352/59140© 1998 IOP Publishing Ltd. This work was supported by DGICYT (project PB96-0639). MHZ thanks AECI and CoNaCyT for a research grant. The help of Dr J M G´omez de Salazar on mechanical treatments is also acknowledged.The effect of indentation on the cathodoluminescence (CL) of GaN:Si epitaxial films has been investigated in the scanning electron microscope. Deformation produces changes in the defect structure which are monitored through the changes induced in the cathodoluminescent emission. Besides a general quenching of the luminescence, an increase of the relative intensity of the deep level bands is observed. The effect of different annealing treatments on the CL emission has been investigated.engjournal articlehttp://dx.doi.org/10.1088/0268-1242/13/8/013http://iopscience.iop.org/restricted access538.9Light-Emitting-DiodesCathodoluminescenceFísica de materiales