Méndez Martín, María BianchiPiqueras De Noriega, Francisco JavierPlugaru, RCraciun, G.Nastase, N.Cremades Rodríguez, Ana IsabelNogales Díaz, Emilio2023-06-202023-06-2019981012-0394https://hdl.handle.net/20.500.14352/58850Luminescence emission of nanocrystalline silicon films has been studied by cathodoluminescence (CL) in the scanning electron microscope. As deposited films show visible luminescence with dominant blue band as well as a red band. The evolution of CL bands after implantation and anodization treatments is investigated. Our results suggest that the dominant blue band has a complex character with a component at 400 nm which appears related to quantum size effects.Cathodoluminescence from nanocrystalline silicon films in the scanning electron microscopejournal articlehttp://dx.doi.org/10.4028/www.scientific.net/SSP.63-64.191http://www.scientific.net/metadata only access538.9Porous SiliconLuminescenceDislocationsDefectsSiFísica de materiales