Bartolomé Vílchez, JavierCremades Rodríguez, Ana IsabelPiqueras De Noriega, Francisco Javier2023-06-182023-06-182015-11-090003-695110.1063/1.4935708https://hdl.handle.net/20.500.14352/24308©2015 AIP Publishing LLC. This work has been supported by MINECO (Project Nos. MAT 2012-31959 and CSD 2009-00013). J.B. acknowledges the financial support from Universidad Complutense de Madrid.The mechanical resonance behavior of as-grown In_2O_3 microrods has been studied in this work by in-situ scanning electron microscopy (SEM) electrically induced mechanical oscillations. Indium oxide microrods grown by a vapor–solid method are naturally clamped to an aluminum oxide ceramic substrate, showing a high quality factor due to reduced energy losses during mechanical vibrations. Quality factors of more than (10)^5 and minimum detectable forces of the order of (10)^(16) N/Hz^(1/2) demonstrate their potential as mechanical microresonators for real applications. Measurements at low- vacuum using the SEM environmental operation mode were performed to study the effect of extrinsic damping on the resonators behavior. The damping coefficient has been determined as a function of pressure.engjournal articlehttp://dx.doi.org/10.1063/1.4935708http://scitation.aip.orgopen access538.9Nanomechanical resonatorsCantileversNanobeltsGrowthNanowiresResonancePressureDiamondFísica de materialesFísica del estado sólido2211 Física del Estado Sólido