Bock, Przemek J.Cheben, PavelVillafranca Velasco, AitorSchmid, Jens H.Delâge, AndréFlorjańczyk, MirosławLapointe, JeanXu, Dan-XiaVachon, MartinJanz, SiegfriedCalvo Padilla, María Luisa2023-06-192023-06-192013-111863-888010.1002/lpor.201300063https://hdl.handle.net/20.500.14352/33530© 2013 by WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. This research was conducted at the National Research Council Canada. Coauthor A. V. V. acknowledges the financial support from the Spanish Ministry of Economy under grant EC2011-23629.A planar waveguide Fourier-transform spectrometer with densely arrayed Mach-Zehnder interferometers is demonstrated. Subwavelength gratings are used to produce an optical path difference without waveguide bends. The fabricated device comprises of an array of 32 Mach-Zehnder interferometers, which produce a spatial interferogram without any moving parts, yielding a spectral resolution of 50 pm and a free-spectral range of 0.78 nm. As a result of similar propagation losses in subwavelength grating waveguides and conventional strip waveguides, loss imbalance is minimized and high interferometic extinction ratio of -25 to -30 dB is obtained. Furthermore, phase and amplitude errors arising from normal fabrication variation are compensated by the spectral retrieval process using calibration measurements.Subwavelength grating Fourier-transform interferometer array in silicon-on-insulatorjournal articlehttp://dx.doi.org/10.1002/lpor.201300063http://onlinelibrary.wiley.commetadata only access535Planar Wave-GuideSpatial Heterodyne SpectrometerResolutionÓptica (Física)2209.19 Óptica Física