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Consequently, blind areas or profile artifacts may be observed when using common reflection micro-optical profilometers (confocal, scanning interferometers, etc…). The Topographic Optical Profilometry by Absorption in Fluids (TOPAF) essentially avoids these limitations. In this technique an absorbing fluid fills the gap between a reference surface and the surface to profile. By comparing transmission images at two different spectral bands we obtain a reliable topographic map of the surface. In this contribution we develop a model to obtain the profile under micro-optical observation, where high numerical aperture (NA) objectives are mandatory. We present several analytical and experimental results, validating the technique’s capabilities for profiling steep slopes and highly curved micro-optical surfaces with nanometric height resolution.engjournal articlehttps://doi.org/10.1364/OE.23.009494https://www.osapublishing.org/oe/abstract.cfm?uri=oe-23-7-9494restricted access681.7.03539.211InstrumentationMeasurementMetrologyOptical inspectionSurface measurementsMicro-optical devicesOptical profilometryÓptica (Física)Materiales ópticos2209.19 Óptica Física2209.14 Propiedad ópticas de los sólidos