Bartolomé Vílchez, JavierHidalgo Alcalde, PedroMaestre Varea, DavidCremades Rodríguez, Ana IsabelPiqueras De Noriega, Francisco Javier2023-06-192023-06-192014-04-210003-695110.1063/1.4872461https://hdl.handle.net/20.500.14352/33678© 2014 AIP Publishing LLC. This work has been supported by MINECO (Project Nos. MAT 2012-31959 and CSD 2009-00013). J.B. acknowledges the financial support from Universidad Complutense de Madrid.Electric field induced mechanical resonances of In2O3 microrods are studied by in-situ measurements in the chamber of a scanning electron microscope. Young's moduli of rods with different cross-sectional shapes are calculated from the resonance frequency, and a range of values between 131 and 152GPa are obtained. A quality factor of 1180-3780 is measured from the amplitude-frequency curves, revealing the suitability of In2O3 microrods as micromechanical resonators. The Young's modulus, E, of one of the rods is also measured from the elastic response in the force-displacement curve recorded in an atomic force microscope. E values obtained by in-situ scanning electron microscopy and by atomic force microscopy are found to differ in about 8%. The results provide data on Young's modulus of In2O3 and confirm the suitability of in-situ scanning electron microscopy mechanical resonance measurements to investigate the elastic behavior of semiconductor microrods.engjournal articlehttp://dx.doi.org/10.1063/1.4872461http://scitation.aip.orgopen access538.9Crystalline Boron NanowiresElastic PropertiesZno NanobeltsMechanicsFísica de materiales