Siegmann, PhilipSánchez Brea, Luis MiguelMartínez Antón, Juan CarlosBernabeu Martínez, Eusebio2023-06-202023-06-202004-11-150169-433210.1016/j.apsusc.2004.05.240https://hdl.handle.net/20.500.14352/51200© 2004 Elsevier B.V. The authors thank Javier Alda for his valuable suggestions. This article is financed with DPI2001-1238 project.Conventional microscopy techniques, such as atomic force microscopy (AFM), scanning electron microscopy (SEM), and confocal microscopy (CM) are not suitable for on-line surface inspection of fine metallic wires. In the recent years, some optical techniques have been developed to be used for those tasks. However, they need a rigorous validation. In this work, we have used confocal microscopy to obtain the topography z(x,y) of wires with longitudinal defects, such as dielines. The topography has been used to predict the light scattered by the wire. These simulations have been compared with experimental results, showing a good agreement.engjournal articlehttp://dx.doi.org/10.1016/j.apsusc.2004.05.240http://www.sciencedirect.comopen access535Surface-DeffectsÓptica (Física)2209.19 Óptica Física