Pérez Zenteno, Francisco JoséSan Andrés Serrano, EnriqueGarcía Hemme, EricTorres, IgnacioBarrio, RocíoCaudevilla Gutiérrez, DanielDuarte Cano, SebastiánGarcía Hernansanz, RodrigoOlea Ariza, JavierPastor Pastor, DavidPrado Millán, Álvaro Del2023-12-152023-12-152023F. J. P. Zenteno et al., "High Pressure Sputtering of Mo Targets in Mixed Ar/O2/H2 Atmospheres for Hole Selective Contacts in Photovoltaic Cells," 2023 14th Spanish Conference on Electron Devices (CDE), Valencia, Spain, 2023, pp. 1-4, doi: 10.1109/CDE58627.2023.10339462643-130010.1109/CDE58627.2023.10339461https://hdl.handle.net/20.500.14352/91314Se deposita la versión postprint de la ponenciaWe have deposited thin films of MoO x using high-pressure sputtering (HPS) and Ar/O 2 /H 2 atmospheres aiming at the compositional and interface control. We found that H2 impacts plasma composition, which in turn produces a reduction of the oxygen content and a change in the refractive index of the films. However, the presence of hydrogen in the plasma atmosphere enhances interfacial SiO x regrowth, as FTIR shows. TEM measurements show that this regrowth is not critical for thin films. Also, increasing the hydrogen ratio produces a change from amorphous to an amorphous/polycrystalline mixture. Lifetime measurements show that these films are adequate for their integration into test HIT -like structures, but require more work to produce competitive iVoc values.engconference paperhttps://doi.org/10.1109/CDE58627.2023.10339461http://xplorestaging.ieee.org/ielx7/10339380/10339408/10339461.pdf?arnumber=10339461restricted access537Electrónica (Física)2203 Electrónica