Plaza, J. L.Hidalgo Alcalde, PedroDiéguez, E.2023-06-202023-06-2020071742-658810.1088/1742-6596/61/1/187https://hdl.handle.net/20.500.14352/51051© 2007 IOP Publishing Ltd. International Conference on Nanoscience and Technology (2006.Basel, Switzerland ). This work has been supported by the Ministry of Education and Science of Spain under a Ramon y Cajal Contract, by the project MAT2003-09873 and by the project MEC (MAT 2003-00455)The scope of this paper is to analyse the effect of Au and Cr impurities, diffused onto GaSb substrates on the formation of nanodots created by LEIS using Ar+ ions It is concluded that oblique incidence in rotating configuration delays the formation of the nanodots compared to previously reported normal incidence experiments. The presence of cracks induced by the sputtering process has been observed both in the Au and Cr diffused samples. Cathodoluminescence (CL) spectra obtained in irradiated samples both pure and Cr-diffused have revealed no difference between them, showing the usual three band encountered in this material (Band Gap at 798 meV, A Band at 777 meV and tail-states at 815 meV). However, a fourth band has been detected in the Au sample centered at 769 meV.engAtribución 3.0 Españahttps://creativecommons.org/licenses/by/3.0/es/journal articlehttp://dx.doi.org/10.1088/1742-6596/61/1/187http://iopscience.iop.org/open access538.9NanostructuresFísica de materiales