Díaz-Guerra Viejo, CarlosMontone, A.Piqueras De Noriega, Francisco JavierCardellini, F.2023-06-202023-06-2020001012-0394https://hdl.handle.net/20.500.14352/59137© scientific.net. International Workshop on Bean Injection Assessment of Microstructures in Semiconductors (6. 2000. Fukuoka, Japón).Mechanical milling is a technique extensively used to prepare nanocrystalline metallic materials but it has been less frequently applied to semiconductors. The preparation of nanocrystalline silicon by different methods is a subject of increasing interest due to the luminescent properties of this material and its possible application in optoelectronic devices. In this work high-energy ball milling has been used to prepare nanocrystals from single crystalline silicon wafers. The structure of the milled samples has been assessed by X-ray diffraction, transmission electron microscopy (TEM) and Raman spectroscopy, while their luminescence has been investigated by cathodoluminescence (CL) in the scanning electron microscope (SEM). The samples consist of a powder of particles with sizes of hundreds of nanometers aggregated to form bigger particles of several microns. TEM reveals that the particles consist of nanocrystals with a wide range of sizes including crystallites with dimension of few nanometers. CL spectra of the milled samples show a band at 1.61 eV, attributed to the presence of nanocrystals through a quantum confinement effect. It is suggested that a milling induced infrared emission is related to a high density of extended defects present in the milled samples.Cathodoluminescence from nanocrystals in mechanically milled siliconjournal articlehttp://dx.doi.org/10.4028/www.scientific.net/SSP.78-79.103http://www.scientific.netmetadata only access538.9Oxidized Porous SiliconVisible PhotoluminescenceLuminescence PropertiesOptical-PropertiesSiFilmsStatesFísica de materiales