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Cathodoluminescence from implanted and anodized polycrystalline silicon films

dc.contributor.authorPlugaru, Ranica
dc.contributor.authorCraciun, G.
dc.contributor.authorNastase, N.
dc.contributor.authorMéndez Martín, María Bianchi
dc.contributor.authorCremades Rodríguez, Ana Isabel
dc.contributor.authorPiqueras De Noriega, Francisco Javier
dc.contributor.authorNogales Díaz, Emilio
dc.date.accessioned2023-06-20T18:52:25Z
dc.date.available2023-06-20T18:52:25Z
dc.date.issued2000
dc.description©2000 Kluwer Academic Publishers. International Conference on Porous Semiconductors - Science and Technology (PSST 98)(1.1998.Mallorca). This work was supported by NATO (Grant HTECH. CRG 961392) and DGES (Project PB96-0639).
dc.description.abstractLuminescence emission of LPCVD polycrystalline silicon films has been studied by cathodoluminescence (CL) in the scanning electron microscope. As-deposited films show visible luminescence with dominant blue band. The relative intensity of blue emission is enhanced by implantation and by slight anodization treatments. Our investigations are consistent with previous PL results and indicate that the origin of blue emission is related to quantum confinement effects. On the other hand, the effect of annealing in these samples is a reduction of the CL signal that could be related to the increase of the nanocrystals size.
dc.description.departmentDepto. de Física de Materiales
dc.description.facultyFac. de Ciencias Físicas
dc.description.refereedTRUE
dc.description.sponsorshipNATO
dc.description.sponsorshipDGES
dc.description.statuspub
dc.eprint.idhttps://eprints.ucm.es/id/eprint/23407
dc.identifier.doi10.1023/A:1009644401297
dc.identifier.issn1380-2224
dc.identifier.officialurlhttp://link.springer.com/article/10.1023%2FA%3A1009644401297?LI=true#
dc.identifier.relatedurlhttp://link.springer.com
dc.identifier.urihttps://hdl.handle.net/20.500.14352/58824
dc.issue.number1-mar
dc.journal.titleJournal of Porous Materials
dc.language.isoeng
dc.page.final294
dc.page.initial291
dc.publisherKluwer Academic Publishers
dc.relation.projectIDHTECH. CRG 961392
dc.relation.projectIDPB96-0639
dc.rights.accessRightsrestricted access
dc.subject.cdu538.9
dc.subject.keywordPorous Silicon
dc.subject.keywordLuminescence
dc.subject.keywordSurface
dc.subject.keywordPhotoluminescence
dc.subject.keywordEmission
dc.subject.ucmFísica de materiales
dc.titleCathodoluminescence from implanted and anodized polycrystalline silicon films
dc.typejournal article
dc.volume.number7
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dspace.entity.typePublication
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