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Electron beam induced current and remote electron beam induced current assessment of chemical vapor deposited diamond films

dc.contributor.authorCremades Rodríguez, Ana Isabel
dc.contributor.authorPiqueras De Noriega, Francisco Javier
dc.date.accessioned2023-06-20T18:52:46Z
dc.date.available2023-06-20T18:52:46Z
dc.date.issued1999-02-01
dc.description© 1999 American Institute of Physics. This work has been supported by DGICYT (Project PB96-0639). Thanks are due to Professor Dr. M. Schreck and Dr. R. Hessmer for growing the thin films, and Professor Dr. E. Wolfgang for providing the thick samples.
dc.description.abstractIn the present work, electron beam induced current (EBIC) has been applied to characterize several kinds of chemical vapor deposition diamond films. Regions of enhanced carrier recombination are detected in plan-view observations of thin films as well as in cross sections of thick films. Remote EBIC (REBIC) has been applied to obtain information about charged defects present in the samples. The dependence of EBIC and REBIC contrast on the contact configuration used, and on the observation conditions has been analyzed. Cathodoluminescence images of the same samples have been recorded for comparison.
dc.description.departmentDepto. de Física de Materiales
dc.description.facultyFac. de Ciencias Físicas
dc.description.refereedTRUE
dc.description.sponsorshipDGICYT (Spain)
dc.description.statuspub
dc.eprint.idhttps://eprints.ucm.es/id/eprint/23549
dc.identifier.doi10.1063/1.369275
dc.identifier.issn0021-8979
dc.identifier.officialurlhttp://jap.aip.org/resource/1/japiau/v85/i3/p1438_s1
dc.identifier.relatedurlhttp://jap.aip.org
dc.identifier.urihttps://hdl.handle.net/20.500.14352/58840
dc.issue.number3
dc.journal.titleJournal of Applied Physics
dc.language.isoeng
dc.page.final1443
dc.page.initial1438
dc.publisherAmerican Institute of Physics
dc.relation.projectIDPB96-0639
dc.rights.accessRightsopen access
dc.subject.cdu538.9
dc.subject.keywordGrain-Boundaries
dc.subject.keywordCathodoluminescence
dc.subject.keywordDefects
dc.subject.ucmFísica de materiales
dc.titleElectron beam induced current and remote electron beam induced current assessment of chemical vapor deposited diamond films
dc.typejournal article
dc.volume.number85
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relation.isAuthorOfPublication.latestForDiscoveryda0d631e-edbf-434e-8bfd-d31fb2921840

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