Double grating systems with one steel tape grating

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Torcal Milla, Francisco José
Bernabeu Martínez, Eusebio
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Elsevier Science BV
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Steel tape gratings are used in different metrology applications. As the period of these gratings was large (around 100μm,), its analytical study has been performed, up to date, using a geometrical approach. Nowadays, steel tape gratings can be manufactured with lower periods, around 20–40 μm, and diffractive effects must be taken into account. Also, due to the roughness of the surface, statistical techniques need to be considered to analyze their behavior. In this work, an analysis of the pseudo-imaging formation in a double grating system including one steel tape grating is performed. In particular Moiré and Lau configurations are analyzed. We have found that roughness significantly affects to Moiré configuration. However, its effect is negligible in Lau configuration. Generalized grating imaging configuration is also studied in depth. It is shown that roughness does not affect to the contrast of pseudoimages, but it modifies their depth of focus.
© 2008 Elsevier B.V. The authors thank Agustin Gonzalez-Cano for his invaluable help. This work was supported by the DPI2005-02860 project of the Ministerio de Educación y Ciencia of Spain and the “Tecnologías avanzadas para los equipos y procesos de fabricación de 2015: e-eficiente, e-cológica, e-máquina” CENIT project of the Ministerio de Industria, Turismo y Comercio. During the realization of this work Sanchez-Brea was contracted by the Universidad Complutense de Madrid under the “Ramón y Cajal” research program of the Ministerio de Educación y Ciencia of Spain.
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