Application of scanning electron acoustic microscopy to the characterization of n-type and semiinsulating GaAs
| dc.contributor.author | Méndez Martín, María Bianchi | |
| dc.contributor.author | Piqueras De Noriega, Francisco Javier | |
| dc.date.accessioned | 2023-06-20T18:57:27Z | |
| dc.date.available | 2023-06-20T18:57:27Z | |
| dc.date.issued | 1992-03-16 | |
| dc.description | ©2001. All Rights Reserved. This work was supported by the Volkswagen Foundation, by the Comision Interministerial de Ciencia y Tecnologia (Project MAT 90-47) and by DGICYT-DAAD. The authors thank Wacker-Chemitronic (Doctor K. Lohnert ) for providing the samples. | |
| dc.description.abstract | A series of GaAs wafers with different doping levels and electrical resistivity has been used to investigate the scanning electron acoustic microscopy (SEAM) application to the characterization of this material. It has been found that SEAM is particularly useful to characterize semi-insulating GaAs as compared with n-type material. The SEAM signal generation mechanisms in GaAs are discussed. | |
| dc.description.department | Depto. de Física de Materiales | |
| dc.description.faculty | Fac. de Ciencias Físicas | |
| dc.description.refereed | TRUE | |
| dc.description.sponsorship | Volkswagen Foundation | |
| dc.description.sponsorship | Comision Interministerial de Ciencia y Tecnologia | |
| dc.description.sponsorship | DGICYT-DAAD | |
| dc.description.status | pub | |
| dc.eprint.id | https://eprints.ucm.es/id/eprint/25071 | |
| dc.identifier.doi | 10.1063/1.107485 | |
| dc.identifier.issn | 0003-6951 | |
| dc.identifier.officialurl | http://dx.doi.org/10.1063/1.107485 | |
| dc.identifier.relatedurl | http://scitation.aip.org/ | |
| dc.identifier.uri | https://hdl.handle.net/20.500.14352/58995 | |
| dc.issue.number | 11 | |
| dc.journal.title | Applied Physics Letters | |
| dc.language.iso | eng | |
| dc.page.final | 1359 | |
| dc.page.initial | 1357 | |
| dc.publisher | Amer Inst Physics | |
| dc.relation.projectID | MAT 90-47 | |
| dc.rights.accessRights | open access | |
| dc.subject.cdu | 538.9 | |
| dc.subject.keyword | Signal | |
| dc.subject.ucm | Física de materiales | |
| dc.title | Application of scanning electron acoustic microscopy to the characterization of n-type and semiinsulating GaAs | |
| dc.type | journal article | |
| dc.volume.number | 60 | |
| dcterms.references | 1. G. S. Cargill III, Nature 286, 691 (1980). 2. J. F. Bresse and A. C. Papadopoulo, Appl. Phys. Lett. 51, 183 (1987). 3. J. F. Bresse and A. C. Papadopoulo, J. Appl. Phys. 64, 98 (1988). 4. F. J. Rocca and D. G. Davies, J. Phys. D 22, 1894 (1989). 5. B. Mendez and J. Piqueras, Inst. Phys. Conf. Ser. No. 100,789 (1989). 6. F. Dominguez-Adame and J. Piqueras, J. Appl. Phys. 66, 275 1 (1989). 7. B. Méndez and J. Piqueras, J. Appl. Phys. 69, 2776 (1991). 8. M. Urchulutegui, J. Piqueras, and J. Llopis, J. Appl. Phys. 65, 2677 (1989). 9. N. Kultscher and L. J. Balk, Scanning Electron Microsc. I, 33 (1986). 10. C. A. Warwick and G. T. Brown, Appl. Phys. Lett. 46, 574 (1985). | |
| dspace.entity.type | Publication | |
| relation.isAuthorOfPublication | 465cfd5b-6dd4-4a48-a6e3-160df06f7046 | |
| relation.isAuthorOfPublication | 68dabfe9-5aec-4207-bf8a-0851f2e37e2c | |
| relation.isAuthorOfPublication.latestForDiscovery | 465cfd5b-6dd4-4a48-a6e3-160df06f7046 |
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