Aviso: para depositar documentos, por favor, inicia sesión e identifícate con tu cuenta de correo institucional de la UCM con el botón MI CUENTA UCM. No emplees la opción AUTENTICACIÓN CON CONTRASEÑA
 

Speed of fragments ejected by an expanding liquid tin sheet

dc.contributor.authorLio, Bo
dc.contributor.authorHernández Rueda, Francisco Javier
dc.contributor.authorGelderblom, Hanneke
dc.contributor.authorVersolato, Oscar O.
dc.date.accessioned2023-06-22T12:29:44Z
dc.date.available2023-06-22T12:29:44Z
dc.date.issued2022-08-29
dc.description© 2022 American Physical Society. We thank Alexander Klein for providing the double-frame camera utilized in this study. This work was carried out at the Advanced Research Center for Nanolithography (ARCNL), a publicprivate partnership of the University of Amsterdam (UvA), the Vrije Universiteit Amsterdam (VU), the Dutch Research Council (NWO), and the semiconductor equipment manufacturer ASML. This project received funding from the European Research Council (ERC) through Starting Grant No. 802648 and is part of the Vidi research program with Project No. 15697, which is financed by NWO.
dc.description.abstractWe experimentally investigate the speed of fragments produced by ligament breakup in the laser-induced deformation of tin microdroplets into axisymmetric sheets. The experiments were carried out covering a wide range of droplet diameters and laser-pulse energies. In addition to fragments produced by end-pinching, we also observe fragments shed via Rayleigh-Plateau breakup of long ligaments at late times. A double-frame backlit camera was used to obtain the speeds of the fragments u(f) and the time of their detachment t(d). We show that by normalizing u(f) to the initial expansion speed of the sheet R-0, all data collapse onto a single, universal curve that is a function of the dimensionless time t(d)/tau(c) only, where tau(c) is the capillary time. This universal curve is explicitly independent of the droplet's Weber number. The collapse of u(f) is supported by energy conservation arguments. Our findings enable the prediction of the instantaneous speed and position of the fragments shed from liquid tin targets used in state-of-the-art extreme ultraviolet nanolithography, facilitating the design of effective mitigation strategies against microparticulate debris.
dc.description.departmentDepto. de Óptica
dc.description.facultyFac. de Ciencias Físicas
dc.description.refereedTRUE
dc.description.sponsorshipUnión Europea. Horizonte 2020
dc.description.sponsorshipDutch Research Council (NWO)
dc.description.statuspub
dc.eprint.idhttps://eprints.ucm.es/id/eprint/75642
dc.identifier.doi10.1103/PhysRevFluids.7.083601
dc.identifier.issn2469-990X
dc.identifier.officialurlhttp://dx.doi.org/10.1103/PhysRevFluids.7.083601
dc.identifier.relatedurlhttps://journals.aps.org
dc.identifier.urihttps://hdl.handle.net/20.500.14352/72678
dc.issue.number8
dc.journal.titlePhisical review fluids
dc.language.isoeng
dc.publisherAmer Physical Soc
dc.relation.projectIDEUVPLASMA (802648)
dc.relation.projectIDProjets Vidi1(5697)
dc.rightsAtribución 3.0 España
dc.rights.accessRightsopen access
dc.rights.urihttps://creativecommons.org/licenses/by/3.0/es/
dc.subject.cdu535
dc.subject.keywordDrop
dc.subject.keywordSpectra
dc.subject.keywordXiv
dc.subject.ucmFísica (Física)
dc.subject.ucmÓptica (Física)
dc.subject.unesco22 Física
dc.subject.unesco2209.19 Óptica Física
dc.titleSpeed of fragments ejected by an expanding liquid tin sheet
dc.typejournal article
dc.volume.number7
dspace.entity.typePublication
relation.isAuthorOfPublicationd9e54546-b998-4b0e-a825-e1eeef1b159b
relation.isAuthorOfPublication.latestForDiscoveryd9e54546-b998-4b0e-a825-e1eeef1b159b

Download

Original bundle

Now showing 1 - 1 of 1
Loading...
Thumbnail Image
Name:
HernandezRueda 01 libre+CC.pdf
Size:
2.2 MB
Format:
Adobe Portable Document Format

Collections