Study of defects in GaN films by cross-sectional cathodoluminescence

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dc.contributor.authorZaldivar, M.H.
dc.contributor.authorFernández Sánchez, Paloma
dc.contributor.authorPiqueras De Noriega, Francisco Javier
dc.date.accessioned2023-06-20T19:02:12Z
dc.date.available2023-06-20T19:02:12Z
dc.date.issued1998-03-01
dc.description© 1998 American Institute of Physics. This work was supported by DGICYT (Project PB-1256). M.H.Z. thans AECI and CoNaCyt for a research grant.
dc.description.abstractCathodoluminescence (CL) in the scanning electron microscope has been used to study cross-sectional samples on GaN epitaxial films grown on sapphire. Increased CL emission, attributed to the presence of stacking faults and decorated dislocations, is observed in a region of the buffer layer close to the film-substrate interface, In the epilayers also a region of enhanced emission is observed which is partially caused by Si doping and in which structural defects are involved. Cross-sectional CL appears as a useful method to reveal features of the spatial distribution of luminescence, not detectable by plan-view measurements.
dc.description.departmentDepto. de Física de Materiales
dc.description.facultyFac. de Ciencias Físicas
dc.description.refereedTRUE
dc.description.sponsorshipDGICYT
dc.description.sponsorshipAECI
dc.description.sponsorshipCoNaCyT
dc.description.statuspub
dc.eprint.idhttps://eprints.ucm.es/id/eprint/26378
dc.identifier.doi10.1063/1.366634
dc.identifier.issn0021-8979
dc.identifier.officialurlhttp://dx.doi.org/10.1063/1.366634
dc.identifier.relatedurlhttp://scitation.aip.org/
dc.identifier.urihttps://hdl.handle.net/20.500.14352/59145
dc.issue.number5
dc.journal.titleJournal of Applied Physics
dc.language.isoeng
dc.page.final2799
dc.page.initial2796
dc.publisherAmerican Institute of Physics
dc.relation.projectIDPB-93-1256
dc.rights.accessRightsrestricted access
dc.subject.cdu538.9
dc.subject.ucmFísica de materiales
dc.titleStudy of defects in GaN films by cross-sectional cathodoluminescence
dc.typejournal article
dc.volume.number83
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