Surface characterisation and cathodoluminescent response of nanodot-patterned GaSb surfaces by low energy ion sputtering

Abstract

The scope of this paper is to analyse the effect of Au and Cr impurities, diffused onto GaSb substrates on the formation of nanodots created by LEIS using Ar+ ions It is concluded that oblique incidence in rotating configuration delays the formation of the nanodots compared to previously reported normal incidence experiments. The presence of cracks induced by the sputtering process has been observed both in the Au and Cr diffused samples. Cathodoluminescence (CL) spectra obtained in irradiated samples both pure and Cr-diffused have revealed no difference between them, showing the usual three band encountered in this material (Band Gap at 798 meV, A Band at 777 meV and tail-states at 815 meV). However, a fourth band has been detected in the Au sample centered at 769 meV.