Electrical characterization of nanocrystalline Si films by scanning tunnelling spectroscopy and beam-induced current in the scanning tunnelling microscope
dc.contributor.author | Nogales Díaz, Emilio | |
dc.contributor.author | Méndez Martín, María Bianchi | |
dc.contributor.author | Piqueras De Noriega, Francisco Javier | |
dc.contributor.author | Plugaru, R | |
dc.date.accessioned | 2023-06-20T10:40:41Z | |
dc.date.available | 2023-06-20T10:40:41Z | |
dc.date.issued | 2003-01 | |
dc.description | © 2003 IOP Publishing Ltd. This work has been supported by MCYT (Project MAT 2000-2119). RP acknowledges MECD for the research grant SB2000-0164. | |
dc.description.abstract | Nanocrystalline silicon films, with an average nanocrystal size of about 10 nm, obtained by boron implantation of amorphous silicon layers, have been studied by remote-beam-induced current (REBIC) in a scanning tunnelling microscope (STM) and by current imaging tunnelling spectroscopy. STM images reveal a cell structure with cell sizes of about 200 nm. STM-REBIC images display space-charge regions associated with the cell boundaries. The STM-REBIC contrast has been found to depend on the implantation dose and the thermal treatment given to the sample. The results show the capability of STM-REBIC to image electrically active regions in nanocrystalline silicon films with a resolution of up to 10 nm. | |
dc.description.department | Depto. de Física de Materiales | |
dc.description.faculty | Fac. de Ciencias Físicas | |
dc.description.refereed | TRUE | |
dc.description.sponsorship | MCYT | |
dc.description.sponsorship | MECD | |
dc.description.status | pub | |
dc.eprint.id | https://eprints.ucm.es/id/eprint/24415 | |
dc.identifier.doi | 10.1088/0957-4484/14/1/315 | |
dc.identifier.issn | 0957-4484 | |
dc.identifier.officialurl | http://iopscience.iop.org/0957-4484/14/1/315 | |
dc.identifier.relatedurl | http://iopscience.iop.org | |
dc.identifier.uri | https://hdl.handle.net/20.500.14352/50969 | |
dc.issue.number | 1 | |
dc.journal.title | Nanotechnology | |
dc.language.iso | eng | |
dc.page.final | 68 | |
dc.page.initial | 65 | |
dc.publisher | Iop Publishing Ltd | |
dc.relation.projectID | MAT 2000-2119 | |
dc.relation.projectID | SB 2000-0164 | |
dc.rights.accessRights | open access | |
dc.subject.cdu | 538.9 | |
dc.subject.keyword | Luminescence Properties | |
dc.subject.keyword | Tunneling-Microscopy | |
dc.subject.keyword | Porous Silicon | |
dc.subject.keyword | States | |
dc.subject.ucm | Física de materiales | |
dc.title | Electrical characterization of nanocrystalline Si films by scanning tunnelling spectroscopy and beam-induced current in the scanning tunnelling microscope | |
dc.type | journal article | |
dc.volume.number | 14 | |
dcterms.references | [1] Shimizu-Iwayama T, Nakao S and Saitoh K 1994 Appl. Phys. Lett. 65 1814 [2] Zhao X, Schoenfeld O, Kusano J, Aoyagi Y and Sugano T 1994 Japan. J. Appl. Phys. 33 L649 [3] Cullis A G, Canham L T and Calcott P D 1997 J. Appl. Phys. 82 909 [4] Kanemitsu Y 1994 Phys. Rev. B 49 16845 [5] Wolkin M V, Jorne J, Fauchet P M, Allan G and Delerue C 1999 Phys. Rev. Lett. 82 197 [6] Holt D B 1994 Polycrystalline Semiconductors III-Physics and Technology, Solid State Phenomena vol 37–38 ed H P Strunk, J H Werner, B Fortin and O Bonnaud (Zurich: Trans. Tech.) p 171 [7] Palm J 1993 J. Appl. Phys. 74 1169 [8] Díaz-Guerra C and Piqueras J 1999 J. Appl. Phys. 86 1874 [9] Feenstra R M 1994 Surf. Sci. 299/300 965 [10] Hamers R J, Tromp R M and Demuth J E 1986 Phys. Rev. Lett. 56 1972 [11] Plugaru R, Craciun G, Nastase N, Méndez B, Cremades A, Piqueras J and Nogales E 2000 J. Porous Mater. 7 291 [12] Nogales E, Méndez B, Piqueras J and Plugaru R 2001 Semicond. Sci. Technol. 16 789 [13] Kazmerski L L 1991 J. Vac. Sci. Technol. B 9 1549 [14] Koschinski P, Kaufmann K and Balk L J 1994 Proc. 13th Int. Cong. on Electron Microscopy (Paris: Les Editions de Physique) p 1121 | |
dspace.entity.type | Publication | |
relation.isAuthorOfPublication | f65096c2-6796-43bf-a661-9e2079b73d1c | |
relation.isAuthorOfPublication | 465cfd5b-6dd4-4a48-a6e3-160df06f7046 | |
relation.isAuthorOfPublication | 68dabfe9-5aec-4207-bf8a-0851f2e37e2c | |
relation.isAuthorOfPublication.latestForDiscovery | f65096c2-6796-43bf-a661-9e2079b73d1c |
Download
Original bundle
1 - 1 of 1