Optical spectroscopic study of the growth dynamics
of radio-frequency-sputtered YBa2Cu3O(7-x) thin films
| dc.contributor.author | Martil De La Plaza, Ignacio | |
| dc.contributor.author | González Díaz, Germán | |
| dc.contributor.author | Hernández Rojas, J. L. | |
| dc.contributor.author | Lucía Mulas, María Luisa | |
| dc.contributor.author | Sánchez Quesada, Francisco | |
| dc.contributor.author | Santamaría Sánchez-Barriga, Jacobo | |
| dc.date.accessioned | 2023-06-20T19:08:46Z | |
| dc.date.available | 2023-06-20T19:08:46Z | |
| dc.date.issued | 1992-07-13 | |
| dc.description | © American Institute of Physics. | |
| dc.description.abstract | An optical spectroscopic study of the plasma produced during rf sputtering of an YBa2Cu3O7-x target was performed to analyze two basic properties of the deposition process: resputtering effects and oxidation mechanisms. Strong emissions of all the species above a value of the target voltage were found. These observations are associated to a strong secondary electron emission of the target which originates a negative self-bias of the substrate and a subsequent resputtering by argon cations. The addition of different amounts of oxygen to the discharge reveals that preoxidation in the gas phase may decrease the oxygen content in the films: the oxidation of the films is dominated by atomic oxygen. | |
| dc.description.department | Depto. de Estructura de la Materia, Física Térmica y Electrónica | |
| dc.description.faculty | Fac. de Ciencias Físicas | |
| dc.description.refereed | TRUE | |
| dc.description.status | pub | |
| dc.eprint.id | https://eprints.ucm.es/id/eprint/27131 | |
| dc.identifier.doi | 10.1063/1.108193 | |
| dc.identifier.issn | 0003-6951 | |
| dc.identifier.officialurl | http://dx.doi.org/10.1063/1.108193 | |
| dc.identifier.relatedurl | http://scitation.aip.org/ | |
| dc.identifier.uri | https://hdl.handle.net/20.500.14352/59310 | |
| dc.issue.number | 2 | |
| dc.journal.title | Applied physics Letters | |
| dc.language.iso | eng | |
| dc.page.final | 233 | |
| dc.page.initial | 231 | |
| dc.publisher | Amer Inst Physics | |
| dc.rights.accessRights | open access | |
| dc.subject.cdu | 537 | |
| dc.subject.keyword | Physics | |
| dc.subject.keyword | Applied. | |
| dc.subject.ucm | Electricidad | |
| dc.subject.ucm | Electrónica (Física) | |
| dc.subject.unesco | 2202.03 Electricidad | |
| dc.title | Optical spectroscopic study of the growth dynamics of radio-frequency-sputtered YBa2Cu3O(7-x) thin films | |
| dc.type | journal article | |
| dc.volume.number | 61 | |
| dcterms.references | 1) S.I. Shah and P.F. García, Appl. Phys. Lett., 51, 2146 (1987). 2) S.M. Rossnagel and J.J. Cuomo, Am. Inst. Phys. Conf. Proc., 165, 106 (1988). 3) T.I. Selinder, G. Larsson, and U. Helmersson, J. Appl. Phys., 69, 390 (1990). 4) M. Migliuolo, R.M. Belan, and J.A. Brewer, Appl. Phys. Lett., 56, 2572 (1990). 5) J.D. Klein and A. Yen, Appl. Phys. Lett., 55, 2670 (1989). 6) X.X. Xi, X.D. Wu, A. Inam, Q. Li, D. Hemmick, and A. Findikoglu, Appl. Phys. Lett., 57, 96 ( 1990). 7) X.D. Wu, B. Dutta, M.S. Hedge, A. Inam, T. Venkatesan, E.W. Chase, C.C. Chang, and R. Howard, Appl. Phys. Lett., 54, 179 (1989). 8) K.Y. Yang, H. Homma, R. Lee, R. Bhadra, M. Grimsditch, S.D. Bader, J.P. Locquet, Y. Bruynseraede, and I.K. Schuller, Appl. Phys. Lett., 53, 808 (1988). 9) R.H. Hammond and R. Bormann, Physica C, 162-164, 703 (1989). | |
| dspace.entity.type | Publication | |
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| relation.isAuthorOfPublication.latestForDiscovery | a5ab602d-705f-4080-b4eb-53772168a203 |
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