Publication:
Far field of binary phase gratings with errors in the height of the strips

Loading...
Thumbnail Image
Full text at PDC
Publication Date
2009-06-17
Authors
Rico-García, José María
Advisors (or tutors)
Editors
Journal Title
Journal ISSN
Volume Title
Publisher
SPIE
Citations
Google Scholar
Research Projects
Organizational Units
Journal Issue
Abstract
Diffraction gratings are not always ideal but, due to the fabrication process, several errors can be produced. In this work we show that when the strips of a binary phase diffraction grating present certain randomness in their height, the intensity of the diffraction orders varies with respect to that obtained with a perfect grating. To show this, we perform an analysis of the mutual coherence function and then, the intensity distribution at the far field is obtained. In addition to the far field diffraction orders, a "halo" that surrounds the diffraction order is found, which is due to the randomness of the strips height.
Description
Copyright 2009. Society of Photo Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. Conference on Modeling Aspects in Optical Metrology II; Munich, GERMANY; JUN 15-16, 2009.
Keywords
Citation
[1] E.G. Loewen, E. Popov, Diffraction gratings and applications (Marcel Dekker, 1997). [2] C. Palmer, Diffraction Grating Handbook (Richardson Grating Laboratory, 2000). [3] R. Petit, Electromagnetic Theory of Gratings (Springer-Verlag, 1980). [4] M. Born, E. Wolf, Principles of Optics (Pergamon Press, 1980). [5] F. Gori “Measuring Stokes parameters by means of a polarization grating,” Opt. Lett. 24, 584-586 (1999). [6] C.G. Someda ”Far field of polarization gratings” Opt. Lett. 24, 1657-1659 (1999). [7] G. Piquero, R. Borghi, A. Mondello, M. Santarsiero "Far field of beams generated by quasi-homogeneous sources passing through polarization gratings," Opt. Comm. 195, 339-350 (2001). [8] F.J. Torcal-Milla, L.M. Sanchez-Brea, E. Bernabeu "Talbot effect with rough reflection gratings", Appl. Opt. 46, 3668- 3673 (2007). [9] L.M. Sanchez-Brea, F.J. Torcal-Milla, E. Bernabeu "Far field of gratings with rough strips" J. Opt. Soc. Am. A 25, 828-833 (2008). [10] Y. Lu, C. Zhou, H. Luo “Near field diffraction of irregular phase gratings with multiple phase-shifts” Opt.Express 13, 6111-6116 (2005). [11] Y. Sheng, S. Li “Talbot effect of a grating with different kind of flaws” J. Opt. Soc. Am. A 22, 2662-2667 (2005). [12] J. Song, S. He “Effects of rounded corners on the performance of an echelle diffraction grating demultiplexer” J. Opt. A: Pure Appl. Opt. 6, 769–773 (2004). [13] H. Wen, D. Pang, Z. Qiang “The impact of phase and amplitude errors on an etched diffraction grating demultiplexer” Opt. Comm. 236, 1–6 (2004). [14] T.R. Michel “Resonant light scattering from weakly rough random surfaces and imperfect gratings” J. Opt. Soc. Am. A 11, 1874-1885 (1994). [15] M.V. Glazov, S.N. Rashkeev “Light scattering from rough surfaces with superimposed periodic structures” Appl. Phys. B 66, 217–223 (1998). [16] V.A. Doroshenko “Singular integral equations in the problem of wave diffraction by a grating of imperfect flat irregular strips” Telecommunications and Radio Engineering, 57, 65-72 (2002). [17] P.P. Naulleau, G.M. Gallatin “Line-edge roughness transfer function and its application to determining mask effects in EUV resist characterization” Appl. Opt. 42, 3390-3397 (2003). [18] F.J. Torcal-Milla, L.M. Sanchez-Brea, E. Bernabeu " Self-imaging of gratings with rough strips" J. Opt. Soc. Am. A 25 2390-2394 (2008). [19] F.J. Torcal-Milla, L.M. Sanchez-Brea, E. Bernabeu “Diffraction of gratings with rough edges” Opt. Express 16 19757-19769 (2008). [20] J. Turunen, F. Wyrowski (eds.), Diffractive Optics for Industrial and Commercial Applications (Akademie Verlag, 1997). [21] B.E. Saleh, M.C. Teich, Fundamentals of Photonics (Wiley, 1991). [22] J.W. Goodman, Introduction to Fourier Optics (McGraw-Hill, 1968). [23] J.W. Goodman, Statistical Optics (John Wiley & sons, 1985). [24] P. Beckmann and A. Spizzichino, The Scattering of Electromagnetic Waves from Rough Surfaces, (Artech House, 1987).