Cathodoluminescence from nanocrystalline silicon films in the scanning electron microscope

Abstract

Luminescence emission of nanocrystalline silicon films has been studied by cathodoluminescence (CL) in the scanning electron microscope. As deposited films show visible luminescence with dominant blue band as well as a red band. The evolution of CL bands after implantation and anodization treatments is investigated. Our results suggest that the dominant blue band has a complex character with a component at 400 nm which appears related to quantum size effects.