Publication: Recubrimientos nanocolumnares estructurados sobre sustratos rugosos y litografiados en condiciones industriales
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2023-06-01
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Universidad Complutense de Madrid
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Abstract
En esta Tesis Doctoral Industrial se estudia la problemática del diseño de un sistema de deposición de pulverización catódica en geometría de ángulo oblicuo en escalas y condiciones industriales para operar sobre superficies rugosas de grado industrial. Esta técnica, de amplio uso, se suele utilizar para hacer recubrimientos de tipo compacto en su geometría clásica, mientras que su uso a ángulo oblicuo, responsable del crecimiento nanocolumnar, está restringido a laboratorios de investigación debido a las numerosas restricciones que impone dicha geometría de trabajo, e. g. inhomogeneidad de los recubrimientos, dificultad para producción en serie, imposibilidad de operar sobre grandes superficies, etc. En pequeñas superficies, los recubrimientos nanocolumnares son bien conocidos por poseer propiedades singulares asociadas a su baja densidad y a la alta superficie específica de las nanocolumnas. Es por esto que el desarrollo de esta técnica en escalas operativas industriales resulta clave para su incorporación en diferentes dispositivos tecnológicos y para el desarrollo de aplicaciones basadas en ellas...
This industrial PhD Thesis aims at studying the problems associated with the design of a magnetron sputtering reactor to operate at oblique angle geometries over large industrial rough substrates. This technique, in its classical non-oblique configuration, is widely employed in research laboratories and in the industry to coat large surfaces with compact homogeneous thin films. Yet, the use of the oblique angle configuration is currently constrained to conditions found in research laboratories, such as the requirement of small-scale and ultrasmooth flat substrates. Also, some consequences of the use of this configuration, e.g. thin film inhomogeneity, or the impossibility to operate on roll-to-roll systems, for instance, have prevented until now its implementation at industrial scales. On small laboratory-size substrates, the films produced at oblique geometries are formed by a disordered array of tilted nanocolumns, with diameter ~100 nm and separated side-to-side a similar distance. This gives these films high porosity, low density, and high specific surface, which confer them unique and remarkable properties, with applications in fields as different as sensors, optics, microelectronics, optoelectronics, plasmonics, microfluidics, etc. Consequently, the development of a clear strategy to grow this type of films at industrial scales represents a fundamental key challenge to develop/improve numerous state of the art technological devices...
This industrial PhD Thesis aims at studying the problems associated with the design of a magnetron sputtering reactor to operate at oblique angle geometries over large industrial rough substrates. This technique, in its classical non-oblique configuration, is widely employed in research laboratories and in the industry to coat large surfaces with compact homogeneous thin films. Yet, the use of the oblique angle configuration is currently constrained to conditions found in research laboratories, such as the requirement of small-scale and ultrasmooth flat substrates. Also, some consequences of the use of this configuration, e.g. thin film inhomogeneity, or the impossibility to operate on roll-to-roll systems, for instance, have prevented until now its implementation at industrial scales. On small laboratory-size substrates, the films produced at oblique geometries are formed by a disordered array of tilted nanocolumns, with diameter ~100 nm and separated side-to-side a similar distance. This gives these films high porosity, low density, and high specific surface, which confer them unique and remarkable properties, with applications in fields as different as sensors, optics, microelectronics, optoelectronics, plasmonics, microfluidics, etc. Consequently, the development of a clear strategy to grow this type of films at industrial scales represents a fundamental key challenge to develop/improve numerous state of the art technological devices...
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Tesis inédita de la Universidad Complutense de Madrid, Facultad de Ciencias Químicas, leída el 15-07-2022