FeB and CrB pair reassociation kinetics in imperfect Si controlled by contactless lifetime scan maps

Abstract

The kinetics of "metal-acceptor" pairing in boron-doped multicrystalline samples are investigated by means of contactless lifetime measurement. The case of FeB and CrB pairs is discussed and the influence of extended defect is evidenced for FeB. It is found that the reassociation of the "metal-acceptor" pairs is fast immediately after the dissociation and then slows down for several days. The results allow the identification of mixed contamination by Cr and Fe.