High Resolution Fourier-Transform Microspectroscopy Based on Spiral Silicon Waveguides

Abstract

We report a spatial heterodyne Fourier-transform spectrometer consisting of an array of Mach-Zehnder interferometers (MZI) implemented in silicon microphotonics. Optical path differences between the MZI arms increase linearly along the array, generating a wavelength-dependent interferogram which enables the retrieval of the source spectrum with a single measurement. Optical delays were implemented with Si-wire waveguides arranged in tightly coiled spirals to achieve a high resolution in a reduced footprint. Our spectral retrieval algorithm compensates phase and amplitude errors arising from fabrication imperfections by using a transformation matrix based on the calibration data. A wavelength resolution of 40 pm within a free spectral range of 0.75 nm is demonstrated.