Uniformity characterization of SI-GaAs by cathodoluminescence and scanning electron acoustic microscopy
| dc.book.title | Microscopy of Semiconducting Materials 1989 | |
| dc.contributor.author | Méndez Martín, María Bianchi | |
| dc.contributor.author | Piqueras De Noriega, Francisco Javier | |
| dc.date.accessioned | 2023-06-20T21:09:14Z | |
| dc.date.available | 2023-06-20T21:09:14Z | |
| dc.date.issued | 1989 | |
| dc.description | © IOP Publishing LTD. Conference on Microscopy of Semiconducting Materials (1989. Oxford) | |
| dc.description.abstract | The capabilities of SEAM in uniformity assessment of SI GaAs are investigated. Profiles of SEAM signals across the wafer and SEAM images of dislocation distribution are obtained. Part of the nonlinear signal shows a profile that is not related to dislocation distribution. | |
| dc.description.department | Depto. de Física de Materiales | |
| dc.description.faculty | Fac. de Ciencias Físicas | |
| dc.description.refereed | TRUE | |
| dc.description.status | pub | |
| dc.eprint.id | https://eprints.ucm.es/id/eprint/25128 | |
| dc.identifier.isbn | 0-85498-056-3 | |
| dc.identifier.issn | 0951-3248 | |
| dc.identifier.uri | https://hdl.handle.net/20.500.14352/60829 | |
| dc.issue.number | 100 | |
| dc.journal.title | Institute of Physics Conference Series | |
| dc.page.final | 794 | |
| dc.page.initial | 789 | |
| dc.page.total | 6 | |
| dc.publisher | IOP Publishing LTD | |
| dc.relation.ispartofseries | Institute of Physics Conference Series | |
| dc.rights.accessRights | metadata only access | |
| dc.subject.cdu | 538.9 | |
| dc.subject.keyword | Lec Gaas | |
| dc.subject.keyword | Semiconductors | |
| dc.subject.ucm | Física de materiales | |
| dc.title | Uniformity characterization of SI-GaAs by cathodoluminescence and scanning electron acoustic microscopy | |
| dc.type | book part | |
| dspace.entity.type | Publication | |
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| relation.isAuthorOfPublication | 68dabfe9-5aec-4207-bf8a-0851f2e37e2c | |
| relation.isAuthorOfPublication.latestForDiscovery | 465cfd5b-6dd4-4a48-a6e3-160df06f7046 |