Micromachined silicon lenses for terahertz applications
Loading...
Official URL
Full text at PDC
Publication date
2013
Advisors (or tutors)
Editors
Journal Title
Journal ISSN
Volume Title
Publisher
Elsevier
Citations
Exportar
Citation
Bueno, J., López Camacho, E., Silva López, M. et al. «Micromachined Silicon Lenses for Terahertz Applications». Infrared Physics & Technology, vol. 61, noviembre de 2013, pp. 144-48. DOI.org (Crossref), https://doi.org/10.1016/j.infrared.2013.08.002.
Abstract
Silicon microlenses are a very important tool for coupling terahertz (THz) radiation into antennas and detectors in integrated circuits. They can be used in a large array structures at this frequency range reducing considerably the crosstalk between the pixels. Drops of photoresist have been deposited and their shape transferred into the silicon by means of a Reactive Ion Etching (RIE) process. Large silicon lenses with a few mm diameter (between 1.5 and 4.5 mm) and hundreds of μm height (between 50 and 350 μm) have been fabricated. The surface of such lenses has been characterized using Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM), resulting in a surface roughness of about ∼3 μm, good enough for any THz application. The beam profile at the focal plane of such lenses has been measured at a wavelength of 10.6 μm using a tomographic knife-edge technique and a CO2 laser.