Scanning electron acoustic microscopy of electronic materials

Abstract

Some scanning electron acoustic microscopy (SEAM) applications to the characterization of electronic materials are discussed. The specific problem of the observation of dislocations and dislocation-related features in GaAs is treated as an example of SEAM capability and limitations in the characterization of III-V compounds. However, SEAM is applied to study high T(c) superconductors. It is shown that evolution of the SEAM signal with temperature can provide information about structural changes above the critical temperature.